Atomic Layer Deposition Special Issue
Atomic Layer Etching Special Issue
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A is soliciting research articles for publication in a Special January/February 2017 Issue on Atomic Layer Deposition along with a Special Issue on Atomic Layer Etching.
These special issues were planned in collaboration with ALD 2016 and the ALE Workshop being held in Dublin, Ireland, during July 24th – July 27th 2016. The Special Issues was dedicated to the science and technology of atomic layer controlled deposition of thin films.