16th International Conference on Atomic Layer Deposition, 24th-27th July 2016, Dublin, Ireland


Atomic Layer Deposition Special Issue
Atomic Layer Etching Special Issue

Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A is soliciting research articles for publication in a Special January/February 2017 Issue on Atomic Layer Deposition along with a Special Issue on Atomic Layer Etching.

These special issues were planned in collaboration with ALD 2016 and the ALE Workshop being held in Dublin, Ireland, during July 24th – July 27th 2016. The Special Issues was dedicated to the science and technology of atomic layer controlled deposition of thin films.


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Tyndall National Institute
Hooking together European Research in Atomic Layer Deposition
COST European Cooperation in Science and Technology
Lund University
Failte Ireland
Meet in Ireland
Science Foundation Ireland